SAN JOSE, California (Reuters) – (This Feb. 24 story has been corrected to say that Intel is using 18A manufacturing technology to test the high NA tools, not using high NA machines to develop 18A manufacturing technology, in paragraph 9) Intel on Monday said that the first two cutting-edge lithography machines from ASML Holding are “in production” at its factories, with early data indicating they are more reliable than earlier models. At a conference in San Jose, California, Intel senior principal engineer Steve Carson said Intel has produced 30,000 wafers, the large discs of silicon that can yield thousands of computing chips, in a single quarter with ASML’s high numerical aperture (NA) lithography machines.
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